电子显微镜用灯丝 （TFE）

"LaB6 Cathode" and "TFE" are used as electronic sources in electron microscopes (SEM, TEM) that are indispensable for nanotechnology, furthering addition to which, there is increasing demand for them as materials for semiconductor manufacturing/inspection equipment as well. Also, room temperature operating type Ga ion source "L-MION" is used as the ion source for focused ion beam (FIB) equipment.

"LaB6 Cathode," which is processed to high precision by using high quality LaB6 monocrystals, offers higher luminosity and a longer life than tungsten filaments. Also, "TFE," which undergoes high precision chip processing, offers even higher luminosity and longer life. The Ga ion source "L-MION" realizes stable ion radiation through its special chip treatment.

(1) Electron source for electron microscopes (SEM, TEM)
(2) Electron source for semiconductor inspection equipment (DR-SEM, CD-SEM WI-SEM) (EB exposure equipment)
(3) Ion source for focused ion beam (FIB) equipment
(4) Electron source for plasma generation equipment
(5) Electron source for ion plating

Made in Japan

联系方式：
电子工业关联
营业开发部：金 嵘
Tel：021-62950958
Fax：021-62094245
Mail：jin@hissan.com.cn